Misalignment measurement using circular grating moiré fringes via high-order phase harmonics

Publication date: January 2026

Source: Optics and Lasers in Engineering, Volume 196

Author(s): Yaoxu Yan, Jiantao Yan, Bin Lin, Zhebo Chen

​Publication date: January 2026Source: Optics and Lasers in Engineering, Volume 196Author(s): Yaoxu Yan, Jiantao Yan, Bin Lin, Zhebo Chen Read More

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