Employing a uc‐Si:H(P+)/MoOx Bilayer Hole Transport Layer for Enhanced Performance in Silicon Heterojunction Solar Cells

Employing a uc-Si:H(P+)/MoOx Bilayer Hole Transport Layer for Enhanced Performance in Silicon Heterojunction Solar Cells

Structure and IV characterization diagram of solar cells.

In silicon heterojunction (SHJ) solar cells, thinning the hydrogenated microcrystalline silicon hole layer (uc-Si:H(p+)) reduces its parasitic absorption and increases the short-circuit current density (J
sc), but deteriorates passivation, significantly lowering the open-circuit voltage (V
oc) and fill factor (FF), thus limiting efficiency. This work proposes and validates an ultrathin nanocrystalline silicon/molybdenum oxide (uc-Si:H(p+)/MoOx) bilayer hole transport structure that effectively resolves this tradeoff. The ultrathin uc-Si:H(p+) layer within the bilayer minimizes sputtering damage from MoOx deposition and provides a degree of carrier selectivity. The MoOx layer enhances cell passivation by blocking indium diffusion from the transparent conductive oxides (TCO) into the uc-Si:H(i) layer and passivating dangling bonds at the uc-Si:H(p+) surface, thereby boosting V
oc. Furthermore, due to its high work function, large conduction band offset, and small valence band offset, MoOx reduces carrier recombination and improves hole extraction and transport, consequently increasing J
sc and FF. The champion cell achieved a V
oc of 0.72 V, J
sc of 40.10 mA/cm2, FF of 78.42%, and power conversion efficiency (PCE) of 22.72%, surpassing the performance of the initial cell with an unthinned uc-Si:H(p+) layer (V
oc 0.72 V, J
sc 38.89 mA/cm2, FF 78.10%, PCE 21.82%).

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