Dynamic diversity-driven hierarchical particle swarm optimization method for edge distortion compensation in digital lithography mask optimization

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Publication date: January 2026

Source: Optics and Lasers in Engineering, Volume 196

Author(s): Shengzhou Huang, Dongjie Wu, Jiani Pan, Yongkang Shao, Siwen He

​Publication date: January 2026Source: Optics and Lasers in Engineering, Volume 196Author(s): Shengzhou Huang, Dongjie Wu, Jiani Pan, Yongkang Shao, Siwen He Read More

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