[ASAP] Reliability Challenges in Equivalent-Oxide-Thickness Scaling with High-κ Er2O3 Dielectrics on Two-Dimensional MoS2 Field-Effect Transistors

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ACS Materials Letters
DOI: 10.1021/acsmaterialslett.5c00291

​ACS Materials LettersDOI: 10.1021/acsmaterialslett.5c00291 Read More

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